Micro/nanotechnology has become very important in creating innovative technologies in the fields of ultrahigh precision mechatronics, bio-medical engineering and energy/environmental technology. This course introduces fundamental aspects of micromechatronics. It involves scaling laws at the micro/nano-scales, electrostatics, piezoelectrics, electromagnetism, measurement tools, control algorithms, materials and fabrication methods, diverse micromechatronic systems and their engineering applications.

CILO-1: Apply advanced knowledge of mathematics, physical science, and engineering appropriate to micromechatronics. CILO-2: Communicate effectively by writing and presenting on various micromechatronic systems and their applications. CILO-3: Demonstrate competence in the application of physics and engineering to analyze and design micromechatronic systems.